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EMAL News Volume 6 (New Instrumentation 2004)

New Equipment
John Mansfield prepared two proposals to the National Science Foundation this year, one for The Major Research Instrumentation Program (NSF #MRI-0320740) and one for the Instrumentation for Materials Research Program (NSF #IMR-0315633). Both were successful and as a result there will be three new pieces of equipment delivered to EMAL early in 2004.

New TEM - JEOL 3010
The IMR grant partially funded a new TEM. A new JEOL 3010 high resolution transmission electron microscope will replace the JEOL 4000EX in room 429. This will be a 300kV instrument with a LaB6 gun and a side entry goniometer. The point-too-point resolution will be the same as the JEOL 4000EX (0.17nm). The instrument is expected to arrive in January 2004.

JEOL 3010 TEM

New FIBs
The MRI grant partially funded the purchase of focussed ion beam technology for EMAL. Two new dual-beam focussed ion beam workstations will be located in EMAL.

Nova Nanolab 200
The first instrument to arrive (due January 2004) will be an FEI Nova Nanolab 200. This instrument is a focussed ion beam workstation and a high resolution scanning electron microscope in one package. The point to point resolution of the SEM is 1.1nm and the ion resolution is 7nm. The system will be capable of nanomachining, SEM and TEM specimen preparation and semiconductor edit and repair. It will have a Kleindeik Nanotechnik micromanipulator for in-situ sample lift out and sample manipulation (PDF). A platinum deposition system and insulator enhanced etch (XeF2) will be included as will an EDAX XEDS system.

This instrument will be located in room 426 and will replace the PHI 660 Auger system that has already been retired.

Nova Nanolab 200 FIB

Quanta 200 3D
Due in March 2004, a second dual-beam FIB will replace the Electroscan E3 in room 422. The Quanta will have a tungsten based electron optical column with a resolution of 3.5nm and an ion resolution of 10nm. The system will be an ESEM and a low vacuum SEM in addition to a high vacuum SEM. It will be capable of platinum deposition and the E3 Peliter and hot stages will be modified to fit into it.

Quanta 200 3D