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Dr. Thomas F. Kelly Imago Scientific Instruments 6300 Enterprise Lane, Suite 100, Madison, WI 53719 Email: tkelly@imago.com 11:30AM, Monday, November 14th, 2005 Room 2246, Space Research Building, University of Michigan, Ann Arbor, MI 48109-2143 (Same building as the North Campus EMAL, for directions click here) Three-dimensional Compositional imaging at the atomic scale: Innovative Atom Probe Tomography Atom probe tomography provides three-dimensional structural and compositional analysis of materials at the atomic-scale. With recent developments in Local Electrode Atom Probe or LEAP® technology by Imago Scientific Instruments, the atom probe’s compositional imaging capabilities are now accessible to non-experts for analysis of a wide variety of materials. The advantages of Imago’s LEAP technology for speed, field of view, and ease of operation will be presented. Important examples of analyses of metals, semiconductors, and thin film structures will be shown and the role this information plays in process and materials development will be described.
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