An Introduction to the Transmission Electron Microscope

An Introduction to the Transmission Electron Microscope - What it is and what it can do. March 27, 2000 Click here to start

Table of Contents An Introduction to the Transmission Electron Microscope - What it is and what it can do. Lecture Outline What is a TEM? What is a TEM? Explanation of features. Electron Beam Source Schematic of the Optics of a Transmission Electron Microscope Schematic Diagram of Crude Electron Lens Modern TEMs Why Electrons? Why Electrons? (2) Resolution limited by lens aberrations Diagram of Thin Transmitting Specimen Elastic Scattering - Imaging Imaging in the TEM Elastic Scattering - Diffraction Contrast Selected Area Diffraction Selected Area Diffraction Pattern Example of Cross sectional TEM. Defect Imaging in the TEM Example Image Elastic Scattering - Phase Contrast Selected Area Diffraction Pattern Silicon <111> HREM Structure Image JEOL 4000EX 1.75Å resolution. HREM Micrograph of BN film on Si High Resolution Image - Grain Boundary Film in a Si3N4 Ceramic Elastic Scattering - Selected Area Diffraction Selected Area Diffraction - Basic Features of an Analytical Electron Microscope Diffraction Pattern Recorded from both BN film & Si substrate Diffraction pattern from M23X6 in Austenite Elastic Scattering - Convergent Beam Electron Diffraction Convergent Beam Electron Diffraction Diagram Why are there so many spots? The Ewald Sphere High Energy Electron Ewald Sphere <111> Cr ZAP Formation of HOLZ rings HOLZ Lines - Deficit in ZOLZ/Excess in HOLZ Direct Disc Si <111> ZAP HOLZ Example <001> CBED ZAPs from Si & SiGe Alloys CBED Simulations M23X6 <110> ZAP Inelastic Scattering - XEDS Electron Excitation of Inner Shell Processes Nomenclature for Principal X-ray Emission Lines What is a TEM? Explanation of features. Large Scale Schematic of a Si-Li Detector Cross Section of Si-Li Detector Electron Excitation of Continuum Processes Characteristic X-Ray Spectrum Illustrating KLM lines Counts are assembled into a histogram that is a plot of the number of counts at each energy bin. XEDS Spectral Processing Simple Data Reduction XEDS Line profiling acquisition Inelastic Scattering - EELS Electron Excitation of Inner Shell Processes PEELS Spectrometer PEELS Spectrum from BN film on Si: Zero Loss PEELS Spectrum from BN film on Si: K Losses Imaging Filter PEELS Spectrum from BN film on Si: K Losses Energy Filtered Imaging Gate Oxide Integrity FEG Applications Sub-nm analysis of novel materials XEDS Maps of Laves Phase in Al-SiC STEM Image of Laves Phase in Al-SiC The Ending Slide		Author: John F. Mansfield Email: jfmjfm@umich.edu Home Page: http://emalwww.engin.umich.edu/ Other information: This presentation is optimized for an 800 by 600 screen. Download presentation source
Copyright © 2004 EMAL & MSE Department, University of Michigan & John F. Mansfield ( jfmjfm@umich.edu)