Table of Contents

Introduction to The Scanning Electron Microscope
based closely on the notes of Wilbur Bigelow Emeritus Professor of Materials Science & Engineering & Former Director of EMAL

 
The Scanning Electron Microscope

Basic Operation (figures by John Mansfield)

Back Scattered Electrons:

Secondary Electron:

Image Formation in the SEM:

Focused Beam Spot Size:

Depth of Focus


 
Modern SEMs

Copyright © 2004 EMAL & MSE Department, University of Michigan