Cameca SX-100 Electron Microprobe Analyzer
Location: 2501B C. C. Little Building
Contact: Gordon Moore
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of NSF grant #EAR-9911352.
Electron Microprobe Analyzer: The instrument utilizes both tungsten and cerium hexaboride sources between 0 and 50 keV and has five vertical wavelength-dispersive spectrometers with a full range of crystal types. The system is extensively computer controlled by both Unix and PC workstations. Other analysis techniques that are available on the instrument compliment the electron microprobe functions and include: a Röntec silicon-drift X-ray energy dispersive spectrometer, secondary electron, backscattered electron and absorbed current imaging and transmitted and reflected light imaging. Cathodoluminescence spectroscopy and imaging experiments are also possible.
Applications
- WDS
- SE/BSE/AEI/CL imaging
Accelerating Voltages
- 5-50kV (continuously variable)
Filament
- W or LaB6
Vacuum
- ~10^-6 torr
SEM Resolution
- 7nm
WDS System
- 5 WDS channels covering elements Be-U.
Stage Control
- * XYZ motorized stage.
XEDS System
- SDD XEDS (elements F-U)
Additional Features
- large WD crystals
- auto optical focus
- digital image acquisition
- wide array of software packages.
- CL fiber optic spectrometer
Artur Deditius, a post-doctoral researcher in the