Cameca SX-100 Electron Microprobe Analyzer
Electron Microprobe Analyzer: The instrument utilizes both tungsten and cerium hexaboride sources between 0 and 50 keV and has five vertical wavelength-dispersive spectrometers with a full range of crystal types. The system is extensively computer controlled by both Unix and PC workstations. Other analysis techniques that are available on the instrument compliment the electron microprobe functions and include: a Röntec silicon-drift X-ray energy dispersive spectrometer, secondary electron, backscattered electron and absorbed current imaging and transmitted and reflected light imaging. Cathodoluminescence spectroscopy and imaging experiments are also possible.
- SE/BSE/AEI/CL imaging
- 5-50kV (continuously variable)
- W or LaB6
- ~10^-6 torr
- 5 WDS channels covering elements Be-U.
- * XYZ motorized stage.
- SDD XEDS (elements F-U)
- large WD crystals
- auto optical focus
- digital image acquisition
- wide array of software packages.
- CL fiber optic spectrometer