The Hitachi S3200N Scanning Electron Microscope
Location: 2501B C. C. Little Building
Contact: Carl Henderson
Scanning Electron Microscopy: The Hitachi S3200N Scanning Electron Microscope is one of a new series of Variable Pressure Scanning Electron Microscopes (VPSEM). The VPSEM is a conventional high resolution thermionic SEM which allows the operator to control the specimen chamber vacuum level and environment. A specimen maybe inserted directly into the VPSEM and observed in it's natural state.
Applications
- SEM
Accelerating Voltages
- 0.3 to 30 kV
Filament
- Tungsten
Vacuum
- VP mode 1.3-270Pa
Detectors
- Imaging - Everhart-Thornley & Robinson BSE Detectors
- XEDS - Noran UTW SiLi detector
Magnification
- 20 - 300,000x
SEM Resolution
- High Vacuum Mode 3.5 nm
- Low Vacuum Mode 5.5nm



