Philips CM12 AEM
Location: 2501B C. C. Little Building
Contact: Gordon Moore or Anja Schleicher
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of NSF grant #EAR-8708276
Analytical Electron Microscopy: Analytical Electron Microscopy is a generic term that is applied to any study where a variety of analysis techniques are used within one particular microscope. These techniques typically include X-ray Energy Dispersive Spectroscopy (XEDS), Electron Energy Loss Spectroscopy (EELS), Selected Area Electron Diffraction (SAED), Convergent Beam Electron Diffration (CBED), Scanning Transmission Electron Microscopy, and Scanning Electron Microscopy. These techniques are briefly described in the glossary.
The University of Michigan EMAL has three analytical microscopes. They range in complexity form a fully commissioned instrument equipped for all of the above techniques to a basic CBED analysis instrument.
- Standard sealed tube X-ray generator for HRXRD, XRD and XRR configurations
- 0 to 120 kV (20 kV steps)
- Single crystal Lanthanum hexaboride
- ~1.5 x10^-7 torr
- CTEM 0.20 nm lattice, 0.34 nm point-to-point
- SEM/STEM Imaging: Everhart-Thornley & Solid State STEM Detector
- XEDS: Kevex UTW Quantum Detector and Kevex 8000 Acquisition System
- Philips Single-Tilt (±45 degrees) Stage.
- Gatan modified Philips Double-Tilt stage (x=±45 degrees,y=±30 degrees) Low Background (Be) Stage