Cameca LEAP 4000X HR Atom Probe Instrument
Location: 415 Space Research Building
Phone: +1-734-936-3350.
Contact: John Mansfield or Emmanuelle Marquis
Instructions:
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of the University of Michigan College of Engineering
Aton Probe Tomography: For further information on this technique see Cameca's website and EMAL's techniques glossary.
Applications
- Atomic scale chemical analysis of metallic alloys, ceramics and semiconductors, precipitates, grain boundaries, interfaces, multilayers, quantum structures, etc.
- Typical reconstructed volumes: 50-150nm by 50-150nm by 40-400nm
Vacuum
- UHV system (Main chamber: <1x10-10torr, storage 5x10-9 torr, Load lock: 5x10-7 torr)
- Specimen temperature: 20-100 K
Voltage Mode
- Repetition rate: <200kHz
- Mass resolution: FWHM > 1/1000
Laser Mode
- UV Laser (355nm, 500fs)
- Spot size: 3 microns
- Repetition rate: <50kHz
- Mass resolution: FWHM > 1/1000
About the Technique
