FEI Nova Nanolab Dualbeam Focussed Ion Beam Workstation and Scanning Electron Microscope
Location: 426 Space Research Building
Contact: John Mansfield or Kai Sun
Instructions: Nova NanoLab Online Documentation
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of NSF grant #DMR-0320740
Applications
- FIB, SEM, XEDS
Accelerating Voltage
- Electrons: 0.2 to 30 kV
- Ions: Upto 30kV
Electron Filament
- Schottky Field Emitter
Vacuum
- Gun Chamber: torr
- Specimen Chamber:
Detectors
- Electron Imaging - Everhart-Thornley Detector (SED)
- Electron Imaging - Through-the-lens Detector
- X-ray - EDAX UTW detector
SEM Resolution
- 3.5nm @ 30kV at high vacuum
- 3.5nm @30kV in ESEM mode
- 15nm @ 3kV in low vacuum mode
Ion Resolution
- 7nm @ 30kV @ 1pA
XEDS System
- EDAX XEDS system integrated into the Support PC
Gas Injectors
- Platinum
- XeF2
Micromanipulator (plucker)
- Kleindiek Nanotechnik MM3A
Included Software
- AutoFIB, AutoTEM, Slice and View and XtDocu
Specimen Preparation Papers of Interest to Users
- Platinum Deposition - FEI's Technical Note on platinum deposition in the DualBeam FIB.
- H-bar technique - "Microscopic studies of semiconductor lasers utilizing a combination of transmission electron microscopy, electroluminescence imaging, and focused ion beam sputtering."
R. Hull, D. Bahnck, F. A. Stevie, L. A. Koszi, and S. N. G. Chu - App. Phys. Lett., Vol. 62, No. 26, 28 June 1993. - H-bar technique - "In Situ Studies of the Interaction of Dislocations withPoint Defects during Annealing of Ion Implanted Si/SiGe/Si (001) Heterostructures."
Eric A. Stach, Robert Hull, John C. Bean, Kevin S. Jones and Ahmed Nejim - Microsc. Microanal. 4, 294 - 307, 1998. - Fold Out Technique - "New FIB Fold-Out Method for TEM Cross-Section Sample Preparation."
Herman C. Floresca, Jangbae Jeon, and M.J. Kim - Microsc. Microanal. 14 (Suppl 2), 1006-7, 2008.
Dr. Sha Zhu, a Post-Doctoral Research Fellow in Nuclear Engineering and Radiological Sciences, sectionning a sample with the Nova NanoLab Dualbeam FIB.