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Al Map on Semiconductor Chip

An X-ray energy dispersive spectrometry map recorded using the aluminum K alpha line. Map recorded on the FEI Quanta Dualbeam with an EDAX Apollo 40 Silicon Drift Detector.

Image by John Mansfield.

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Al Map on Semiconductor Chip

An X-ray energy dispersive spectrometry map recorded using the aluminum K alpha line. Map recorded on the FEI Quanta Dualbeam with an EDAX Apollo 40 Silicon Drift Detector.

Image by John Mansfield.

FEI Helios Nanolab 650 Dualbeam Focussed Ion Beam Workstation and Scanning Electron Microscope

Location: 422 Space Research Building
Contact: John Mansfield , Kai Sun or Haiping Sun
Instructions: Helios NanoLab Online Documentation
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of the University of Michigan College of Engineering

Applications

Accelerating Voltage

Beam Current

Electron Filament

Vacuum

Detectors

SEM Resolution

Ion Resolution

XEDS System & EBSD

Gas Injectors

Micromanipulator (plucker)

Included Software

Specimen Preparation Papers of Interest to Users

FEI Helios NanoLab Dr. Allen Hunter, a Post-Doctoral Research Fellow in Materials Science Engineering, preparing a sample for atomprobe tomographic analysis in the Helios NanoLab Dualbeam FIB.