FEI Quanta 200 3D Focussed Ion Beam Workstation and Environmental Scanning Electron Microscope

Location: Room G029, Building 22 of The North Campus Research Complex/a>
Phone: +1-(734) 764-5630
Contact: John Mansfield or Kai Sun or Haiping Sun
Instructions: Quanta 3D User's Operation Manual and TEM Cross Section Preparation on the Quanta 3D
Webcam: FEI Quanta 3D Webcam
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of NSF grant #DMR-0320740

Environmental Scanning Electron Microscopy: Although an Environmental Scanning Electron Microscope produces a scanned image similar to that of a regular scanning electron microscope, the environment of the sample chamber and the method of detecting the secondary electron signal are novel. The sample chamber is held at a pressure of typically between 1-20 torr.


Accelerating Voltage

Electron Filament



SEM Resolution

Ion Resolution

XEDS System


Micromanipulator (plucker)

Included Software

Specimen Preparation Papers of Interest to FIB Users

Application Notes for ESEM

FEI Quanta 3D Dr. Hugh MacKay, a Post-Doctoral Research Fellow in the Department of Materials Science and Engineeering, demonstrating the use and possible applicatiosn of the Quanta 3D dualbeam FIB to Professor Joanna Mirecki Millunchick's MSE 465 class.