JEOL 2100F Cs-Corrected Analytical Electron Microscope
Location: 432 Space Research Building
Contact: John Mansfield or Kai Sun
Instructions: JEOL 2100F AEM PDF Handbook
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of NSF grant #DMR-0723032
Analytical Electron Microscopy: Analytical Electron Microscopy is a generic term that is applied to any study where a variety of analysis techniques are used within one particular microscope. These techniques typically include X-ray Energy Dispersive Spectroscopy (XEDS), Electron Energy Loss Spectroscopy (EELS), Selected Area Electron Diffraction (SAED), Convergent Beam Electron Diffraction (CBED), Scanning Transmission Electron Microscopy, and Scanning Electron Microscopy. These techniques are briefly described in the glossary.
Applications
- Cs-Corrected Imaging and Spectroscopy
- XEDS, Parallel EELS, Imaging Filter, SAED, CBED, STEM, HAADF STEM, HREM, Diffraction Contrast Imaging
Accelerating Voltage
- 0 to 200 kV (50 V steps)
Filament
- Zirconated Tungsten (100) thermal field emission tipn
Vacuum
- Gun ~1.0 x10^-9 torr
- Column ~1.0 x10^-7 torr
Resolution
- CTEM 0.10 nm lattice / 0.0.19 nm point-to-point
- STEM 0.10 nm Cs-Corrected HAADF (high angle annular dark field)
XEDS System
- Horizontal Ultra-thin Window Si-Li X-ray detector (active area = 30 mm^2) capable of detecting elements with Z >5.
- EDAX r-TEM Detector with EDAX acquisition software
EELS System
- Gatan #863 Tridiem Imaging Filter (GIF) for electron energy loss spectroscopy and imaging.
Image Acquisition & Analysis System
- Gatan Ultrascan 1000 CCD TV camera for high resolution imaging (above the GIF)
Sample Holders
- JEOL Single-Tilt Stage
- JEOL Double-Tilt Analytical Stage
- Gatan #646 Double-Tilt (x=±35 degrees, y=±35 degrees) Low Background (Be) Stage with Faraday cup.
- Gatan #636 Double-Tilt (x=±35 degrees, y=±35 degrees) Low Background (Be) Liquid-Nitrogen Stage.
- Gatan #652 Double-Tilt Heating Holder with a maximum operating temperature of 1000 degrees Celsius.
Other Accesories
- Free lens control, fully independent control of all lenses.
- TEMCon PC control software.
Techniques




The EMAL 2100F Cs Corrected AEM under contruction in room 432 EMAL.