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X-ray Composite Map of Chip

An XEDS map of a semiconductor chip, green is the silicon K alpha line, yellow is the gols M alpha line and red the carbon K line.

Image by John Mansfield

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X-ray Composite Map of Chip

An XEDS map of a semiconductor chip, green is the silicon K alpha line, yellow is the gols M alpha line and red the carbon K line.

Image by John Mansfield

Philips XL30 FEG

Location: Room G027, Building 22 of The North Campus Research Complex
Phone: +1-(734) 764-5623
Contact: John Mansfield, Kai Sun or Haiping Sun
Instructions: Philips XL30FEG PDF Handbook
Webcam: FEI XL30FEG Webcam
Acknowledgments: This instrument was funded from a variety of sources, but the largest portion of the funds came from an AFSOR MURI headed by Ron Gibala (DOD-G-F49620-93-1-0289, Center for Advanced Structural Metallic Materials). Other monies were provided by the College of Engineering and the Department of Materials Science and Engineering.

Scanning Electron Microscopy: The Philips XL30 Scanning Electron Microscope (SEM) is one of a generation of SEMs that is completely controlled from a computer workstation. The XL series instruments are controlled by a personal computer running Microsoft Windows NT. The EMAL instrument employs a thermally assisted Schottky field emission gun for high intensity probe formation. This makes the instrument ideal for both imaging and microanalysis.

Applications

Accelerating Voltage

Filament

Vacuum

Dectectors

Magnification

SEM Resolution

Sample Requirements

SEM Class Lecture Notes

Flash Animations

Philips XL30FEG Muralidharan Ramachandran, a PhD student in the Department of Chemical and Environmental Engineering at the University of Toledo, working in the group of Abdul-Majeed Azad. He is examining the compositions of novel ceramics for use as solid electrolytes in intermediate temperature-solid oxide fuel cells (IT-SOFC) with the XL30FEG SEM.