EMAL - Instruments: Hitachi S3200

EM Software*

Instruments

North Campus

JEOL 2010F

JEOL 3011

FEI Nova NanoLab

FEI Quanta 3D

Philips XL30ESEM

Philips XL30FEG

Nanoscope IIIa

Nanoscope E

Kratos Axis Ultra XPS

Central Campus

Philips CM12

Hitachi S3200

Cameca (4 Spec)

Cameca SX-100

Instrument Handbooks*

Instrument Training Contacts

Use of the Facility

Online Instrument Bookings

North Campus

Central Campus

*Requires the standard emal username and password

Central Campus Instruments - The Hitachi S3200N Scanning Electron Microscope

Location: 2501C C. C. Little Building
Contact: Carl Henderson
Acknowledgments:

Applications

SEM

Accelerating Voltage

0.3 to 30 kV

Filament

Tungsten

Vacuum

VP mode 1.3-270Pa

Detectors

Imaging - Everhart-Thornley & Robinson BSE Detectors

XEDS - Noran UTW SiLi detector

Magnification

20 - 300,000x

SEM Resolution

High Vacuum Mode 3.5 nm

Low Vacuum Mode 5.5nm

Denette Murphy, a graduate student in Biology, operating the Hitachi S3200N SEM.
Scanning Electron Microscopy
The Hitachi S3200N Scanning Electron Microscope is one of a new series of Variable Pressure Scanning Electron Microscopes (VPSEM). The VPSEM is a conventional high resolution thermionic SEM which allows the operator to control the specimen chamber vacuum level and environment. A specimen maybe inserted directly into the VPSEM and observed in it's natural state.