EM Software*
Instruments
North Campus
 JEOL 2010F
 JEOL 3011
 FEI Nova NanoLab
 FEI Quanta 3D
 Philips XL30ESEM
 Philips XL30FEG
 Nanoscope IIIa
 Nanoscope E
 Kratos Axis Ultra XPS
Central Campus
 Philips CM12
 Hitachi S3200
 Cameca (4 Spec)
 Cameca SX-100
Instrument Handbooks*
Instrument Training Contacts
Use of the Facility
Online Instrument Bookings
 North Campus
 Central Campus
*Requires the standard emal username and password
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Central Campus Instruments - Philips CM12

Location: 2501B C. C. Little Building
Contact: Carl Henderson
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of NSF grant #EAR-8708276

Applications
  • SAED, CBED, Diffraction Contrast Imaging
Accelerating Voltage
  • 0 to 120 kV (20 kV steps)
Filament
  • Single crystal Lanthanum hexaboride
Vacuum
  • ~1.5 x10^-7 torr
Resolution
  • CTEM 0.20 nm lattice, 0.34 nm point-to-point
Detectors
  • SEM/STEM Imaging: Everhart-Thornley & Solid State STEM Detector
  • XEDS: Kevex UTW Quantum Detector and Kevex 8000 Acquisition System
Sample Holders
  • Philips Single-Tilt (±45 degrees) Stage.
  • Gatan modified Philips Double-Tilt stage (x=±45 degrees,y=±30 degrees) Low Background (Be) Stage

Lishun Kao, a postgraduate student in Geological Sciences optimizing a STEM image on the Philips CM12.

Analytical Electron Microscopy
Analytical Electron Microscopy is a generic term that is applied to any study where a variety of analysis techniques are used within one particular microscope. These techniques typically include X-ray Energy Dispersive Spectroscopy (XEDS), Electron Energy Loss Spectroscopy (EELS), Selected Area Electron Diffraction (SAED), Convergent Beam Electron Diffration (CBED), Scanning Transmission Electron Microscopy, and Scanning Electron Microscopy. These techniques are briefly described in the glossary.

The University of Michigan EMAL has three analytical microscopes. They range in complexity form a fully commissioned instrument equipped for all of the above techniques to a basic CBED analysis instrument.

Copyright © EMAL & MSE Department, University of Michigan & John F. Mansfield ( jfmjfm@umich.edu)