EM Software*
Instruments
North Campus
 JEOL 2010F
 JEOL 3011
 FEI Nova NanoLab
 FEI Quanta 3D
 Philips XL30ESEM
 Philips XL30FEG
 Nanoscope IIIa
 Nanoscope E
 Kratos Axis Ultra XPS
Central Campus
 Philips CM12
 Hitachi S3200
 Cameca (4 Spec)
 Cameca SX-100
Instrument Handbooks*
Instrument Training Contacts
Use of the Facility
Online Instrument Bookings
 North Campus
 Central Campus
*Requires the standard emal username and password
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Instruments

The following instruments are available in the University of Michigan Electron Microbeam Analysis Laboratory:

North Campus Central Campus
AEM HREM SEM AFM/SPM XPS AEM SEM EMPA

Copyright © EMAL & MSE Department, University of Michigan & John F. Mansfield ( jfmjfm@umich.edu)