Central Campus Instruments - Cameca CAMEBAX Electron Microprobe Analyzer 4 Spectrometers

Applications

WDS, SEM, XEDS

Accelerating Voltage

1 to 50 Kv (continuously variable)

Filament

Tungsten

Vacuum

~10^-6 torr

SEM Resolution

7nm

WDS System

Four vertical wavelength dispersive spectrometers, with four crystal types covering the range of elements from B to U. Data aquisition is microprocessor and computer controlled throughout the process of standardization, analysis, and data output. Up to 15 elements may be analyzed simultaneously with the available software. Apple Macintosh controlled data aquisition and data analysis.

Stage Control

The sample stage is microprocessor controlled and its position is reproducible in X, Y, and Z to 1 µm. Analysis locations may be stored for unattended quantitative analysis of individual points, lines, and grids. There are additional stage automation routines for profiling elemental concentrations over a known distance. Apple Macintosh controlled stage control.

XEDS System

Be window Si-Li X-ray detector capable of detecting elements with Z > 11. Semi-quantitative analysis software routines are available. Computer may also be used for the aquisition of secondary electron, backscattered electron, and X-ray digital images.

Additional Features

Anti-contamination system for analysis of light elements. Sample TV viewing screen. Fast beam blanking. Additional non-automated stage and tilt control.

David Borrok, a graduate student in Geological Sciences operating the Cameca CAMEBAX Electron Microprobe Analyzer Electron Microprobe Analyzer This instrument is designed for quantitative microanalysis using both wavelength and energy dipersive X-ray spectrometry. Samples may be imaged by light optics (transmitted and reflected light) or electron optics (secondary and backscattered electrons and sample current mode) to determine the desired locations for analysis.