Central Campus Instruments - Cameca SX-100 Electron Microprobe Analyzer

Applications

WDS SE/BSE/AEI/CL imaging

Accelerating Voltage

5-50kV (continuously variable)

Filament

W or LaB6

Vacuum

~10^-6 torr

SEM Resolution

7nm

WDS System

5 WDS channels covering elements Be-U.

Stage Control

XYZ motorized stage.

XEDS System

SDD XEDS (elements F-U)

Additional Features

large WD crystals auto optical focus digital image acquisition wide array of software packages CL fiber optic spectrometer

Artur Deditius, a post-doctoral researcher in the Department of Geological Sciences, originally from Poland, operates the Cameca SX-100 Microprobe Analyzer. Electron Microprobe Analyzer The instrument utilizes both tungsten and cerium hexaboride sources between 0 and 50 keV and has five vertical wavelength-dispersive spectrometers with a full range of crystal types. The system is extensively computer controlled by both Unix and PC workstations. Other analysis techniques that are available on the instrument compliment the electron microprobe functions and include: a Röntec silicon-drift X-ray energy dispersive spectrometer, secondary electron, backscattered electron and absorbed current imaging and transmitted and reflected light imaging. Cathodoluminescence spectroscopy and imaging experiments are also possible.