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| EM Software* |
| Instruments |
| JEOL 2010F |
| JEOL 3011 |
| FEI Nova NanoLab |
| FEI Quanta 3D |
| Philips XL30ESEM |
| Philips XL30FEG |
| Nanoscope IIIa |
| Nanoscope E |
| Kratos Axis Ultra XPS |
| Central Campus |
| Philips CM12 |
| Hitachi S3200 |
| Cameca (4 Spec) |
| Cameca SX-100 |
| Instrument Handbooks* |
| Instrument Training Contacts |
| Use of the Facility |
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| North Campus |
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| *Requires the standard emal username and password |
Example XPS data.
<< Return to Kratos Axis Ultra XPS pageSurvey: A quick scan over large energy range at low resolution to identify elements present. | |
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This survey shows sharp XPS peaks for Ti, O, C. You may also see Auger peaks, e.g. O Auger peak at 743eV. Carbon is a common contaminant on the surface of many samples. Oxygen is also often a contaminant.
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Multiplex: A scan over several smaller energy windows at higher resolution. | |
Energy window over Titanium 2p3 peak:
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The 2p3 peak (the higher right hand side peak) has a binding energy of 453.8eV for Ti metal, and 458.5 for TiO2. This high resolution scan shows that the Ti in this sample is in the form of TiO2, not Ti. |
Energy window over Oxygen 1s peak:
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The 1s O peak should be a single peak. In this sample, the oxygen peak is split into two peaks, revealing the presence of two forms of oxygen. Calculating the atomic concentration of Ti,O in this sample gives 27% Ti, 73% O. Obviously there is more O than can be accounted for by TiO2. Some of the oxygen is due to surface contamination.
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Curve fit to deconvolute the Oxygen doublet peak:
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You can separate the two forms of O2 by doing a curve fit to deconvolute the peaks. |